Si Ring - PRODUCT

Silicon Ring

Descriptions

The silicon ring mounted around wafer on ESC serves to maintain a uniform plasma density and etching rate

View more information

Properties	Value
Material	Single Crystal Silicon
Out diameter	480mm ~ 240mm
Resistivity(Ω.㎝)	Low Res. (< 0.02) / Middle Res. (1~4) / High Res. (60~90))
Surface condition	Polishing, Lapping, Grinding
Surface Flatness	< 5㎛
Machining precision	< 10㎛
Quality	Chipping, Scratch, Crack free, Contamination, Stain free

PRODUCT