본문바로가기

PRODUCT

Differentiated technology and
industry-leading expertise.

Ring

Silicon Ring

Descriptions

The silicon ring mounted around wafer on ESC serves to maintain a uniform plasma density and etching rate

View more information

Specifications

Properties Value
Material Single Crystal Silicon
Out diameter 480mm ~ 240mm
Resistivity(Ω.㎝) Low Res. (< 0.02) / Middle Res. (1~4) / High Res. (60~90))
Surface condition Polishing, Lapping, Grinding
Surface Flatness < 5㎛
Machining precision < 10㎛
Quality Chipping, Scratch, Crack free, Contamination, Stain free

SITEMAP