合成石英

ALCHEMIST的所有产品均根据工业现场要求的标准而设计，
以积累的技术实力为基础，进一步强化耐久性、精密度和稳定性，可以放心使用。

合成石英

蚀刻零部件

ALCHEMIST合成石英的特点是纯度高和OH含量低，
拥有内部没有气泡缺陷的高密度结构，能在蚀刻工艺中减少颗粒的产生。

※ NQ #4 : Natural quartz materials and parts are also supported

Unit : ppb

Item	Al	Be	Ca	Co	Cr	Cu	Fe	K	Li	Mg	Mn	Na	Ni	Ti	V	Zn
EQ#01	≤10	≤1	≤10	≤1	≤1	≤1	≤5	≤30	≤1	≤10	≤1	≤15	≤1	≤1	≤1	≤1
EQ#02	≤10	≤1	≤10	≤1	≤1	≤1	≤5	≤30	≤1	≤10	≤1	≤15	≤1	≤1	≤1	≤1

Physical Properties

Items	Values
Density ( g/cm3 )	2.2
Coefficient of Thermal Expansion ( x10-7 /K )	5.5
Softening Point (˚C )	1.670
Annealing Point (˚C )	1.210
Strain Point (˚C )	1.070
Thermal Conductivity(20 ℃ , w/m.k)	1.38

Product Size

Unit : mm

OD	ID	Thickness Range	Tolerance (OD, ID, T)	WT Tolerance
370	300	4 ~ 65	±0.5	±10.0%
420	330	4 ~ 65	±0.5	±10.0%
470	350	4 ~ 65	±0.5	±10.0%
520	400	4 ~ 65	±0.5	±10.0%

Synthetic Quartz Product Line

	Item	Focus Ring	Single Ring	Top Ring	GDP	LINER	Phot Mask
	Process	Etch	Etch	Etch	CVD	CVD	Photo
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Product