陶瓷
ALCHEMIST的所有产品均根据工业现场要求的标准而设计,
以积累的技术实力为基础,进一步强化耐久性、精密度和稳定性,可以放心使用。
陶瓷 概述
铝氧化物
高纯度Al2O3的纯度通常在99.5%以上,并含有超过80%的细颗粒(~<1um)。
陶瓷
Yttria, Y₂O₃
其等离子体刻蚀速率显著低于氧化铝。
这不仅能大幅延长零部件的使用寿命,还能通过保
持腔体清洁,在提升良率方面发挥关键作用。
规格
Properties |
Value |
|---|---|
| Plasma Etch Rate | Extremely low (excellent protection) |
| Chemical Stability | Highly resistant to fluorine (F) and chlorine (Cl) gases |
| Particle Contamination | Minimal corrosion generation, ensuring high cleanliness |
| Electrical Properties | Excellent electrical insulation, but lower than that of alumina |
| Machinability | Difficult to sinter; primarily applied as a coating |
| Application Type | Focus Ring, Chamber Lin |
陶瓷
Alumina, Al₂O₃
即使在高温环境下,它仍能保持优的电绝缘性能;同时,
其卓越的机械强度和耐磨性使其成为一种高度通用的核心材料,
可在多种工艺中支撑半导体设备的结构稳定性。
规格
Properties |
Value |
|---|---|
Plasma Etch Rate |
Relatively high (rapid erosion) |
| Chemical Stability | Resistant to acids and alkalis, but vulnerable to fluorine (F) |
| Particle Contamination | Corrosion-induced contamination |
| Electrical Properties | Very high dielectric breakdown strength |
| Machinability | Easy molding and precision polishing |
| Application Type | Chamber structures and insulating components |