Si Electrode - PRODUCT - 알케미스트

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Gas Flow를 통하여, Plasma 상태를 만들어 주는 역할을 합니다.

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Properties	Value
Material	Single Crystal Silicon
Out diameter	500mm ~ 240mm
Resistivity(Ω.㎝)	Low Res. (<0.02) /Middle Res. (1~4) /High Res. (60~90))
Gas hole	Diameter 0.7~0.3mm /Roundness < 0.05mm/Concentricity < 0.05mm/ Δ XY-Position < 0.05mm(60~90))
Surface condition	Polishing, Lapping, Grinding
Surface Flatness	< 5㎛
Machining precision	< 10㎛
Quality	Chipping, Scratch/Crack free Contamination/Stain free

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