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PRODUCT

Differentiated technology and
industry-leading expertise.

Electrode

Silicon Electrode

Descriptions

The Plasma gas flowing through the micro holes of silicon plate to etch the wafer

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Specifications

Properties Value
Material Single Crystal Silicon
Out diameter

500mm ~ 240mm

Resistivity(Ω.㎝) Low Res. (<0.02) / Middle Res. (1~4) / High Res. (60~90)
Gas hole Diameter 0.7~0.3mm / Roundness < 0.05mm / Concentricity < 0.05mm / Δ XY-Position < 0.05mm
Surface condition Polishing, Lapping, Grinding
Surface Flatness < 5㎛
Machining precision < 10㎛
Quality Chipping, Scratch, Crack free Contamination, Stain free


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