Electrode Silicon Electrode Descriptions The Plasma gas flowing through the micro holes of silicon plate to etch the wafer View more information Specifications Properties Value Material Single Crystal Silicon Out diameter 500mm ~ 240mm Resistivity(Ω.㎝) Low Res. (<0.02) / Middle Res. (1~4) / High Res. (60~90) Gas hole Diameter 0.7~0.3mm / Roundness < 0.05mm / Concentricity < 0.05mm / Δ XY-Position < 0.05mm Surface condition Polishing, Lapping, Grinding Surface Flatness < 5㎛ Machining precision < 10㎛ Quality Chipping, Scratch, Crack free Contamination, Stain free