Si Electrode - PRODUCT

Silicon Electrode

Descriptions

The Plasma gas flowing through the micro holes of silicon plate to etch the wafer

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Properties	Value
Material	Single Crystal Silicon
Out diameter	500mm ~ 240mm
Resistivity(Ω.㎝)	Low Res. (<0.02) / Middle Res. (1~4) / High Res. (60~90)
Gas hole	Diameter 0.7~0.3mm / Roundness < 0.05mm / Concentricity < 0.05mm / Δ XY-Position < 0.05mm
Surface condition	Polishing, Lapping, Grinding
Surface Flatness	< 5㎛
Machining precision	< 10㎛
Quality	Chipping, Scratch, Crack free Contamination, Stain free

PRODUCT